Electron Beam Evaporator

Scanwel offers the SPECS EBE-series mini e-beam evaporators and the CreaTec EBE-AX Electron Beam Evaporator.

SPECS EBE-4 is a combined multi pocket Mini e-beam evaporator capable of evaporating small quantities of almost any material. The material, either from crucible or rod form, is heated by electron bombardment from a surrounding filament, thereby allowing temperatures in excess of 3000K to be reached.

The CreaTec EBE-AX is a single pocket electron beam evaporator designed for use in MBE systems. This deposition technique is typically operated in a vacuum range from 1x10-11 to 1x10-5 mbar and allows an efficient material utilization relative to other methods, which yields a high deposition rate from 0.1 µm x min-1 to 100µm x min-1 at low substrate temperatures.